Letzte Aktualisierung: July 14 2024 23:31:46.
LIF 471V for vacuum applications up to 10/-7 mbar
Produced in clean room environment
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Technical data
LIF 471V for vacuum applications up to 10/-7 mbar
Produced in clean room environment
complete system consisting of:
Scanning unit LIF 47V
Signal period: 4 µm
Coefficient of thermal expansion: ~8ppm/K
Reference mark: Active
Output signals: Square-wave signals,TTL
level with 20-fold
interpolation
Max. scanning frequency: 125 kHz
Reference pulse width: 90°
Fault detection signal: In the event of fault
Ua0/Ua1/Ua2 high
Hysteresis: without
Power supply: 5V +/-5%
Limit switch function: active high
Cable: Polytetrafluoroethylene
(PTFE) shielding
with silver-coated
copper braiding,
Teflon tube
Cable length
(within vacuum): 1.34m to vacuum outlet
Electrical connection D-Sub-connector 15-pin
(within vacuum): male with integrated
interface electronics
APE
Pin layout: D350261
and linear scale LIF 401R
Measuring standard: SUPRADUR-phase grating
Grating period: 8 µm
Thermal expansion coefficient: 8x10^-6 1/K
Accuracy: +/- 3µm
Measuring length: 10 mm
Refrence mark position: at midpoint of
measuring length
Mounting: without Precimet
Special feature: reduced tolerance of
the cable length
Produced in clean room environment
complete system consisting of:
Scanning unit LIF 47V
Signal period: 4 µm
Coefficient of thermal expansion: ~8ppm/K
Reference mark: Active
Output signals: Square-wave signals,TTL
level with 20-fold
interpolation
Max. scanning frequency: 125 kHz
Reference pulse width: 90°
Fault detection signal: In the event of fault
Ua0/Ua1/Ua2 high
Hysteresis: without
Power supply: 5V +/-5%
Limit switch function: active high
Cable: Polytetrafluoroethylene
(PTFE) shielding
with silver-coated
copper braiding,
Teflon tube
Cable length
(within vacuum): 1.34m to vacuum outlet
Electrical connection D-Sub-connector 15-pin
(within vacuum): male with integrated
interface electronics
APE
Pin layout: D350261
and linear scale LIF 401R
Measuring standard: SUPRADUR-phase grating
Grating period: 8 µm
Thermal expansion coefficient: 8x10^-6 1/K
Accuracy: +/- 3µm
Measuring length: 10 mm
Refrence mark position: at midpoint of
measuring length
Mounting: without Precimet
Special feature: reduced tolerance of
the cable length
Identnumber
Identnumber
585011-03
complete system consisting of
complete system consisting of
Scanning unit LIF 47V
Signal period
Signal period
4 µm
Coefficient of thermal expansion
Coefficient of thermal expansion
~8ppm/K
Reference mark
Reference mark
Active
Output signals
Output signals
Square-wave signals,TTL level with 20-fold interpolation
Max. scanning frequency
Max. scanning frequency
125 kHz
Reference pulse width
Reference pulse width
90°
Fault detection signal
Fault detection signal
In the event of fault Ua0/Ua1/Ua2 high
Hysteresis
Hysteresis
without
Power supply
Power supply
5V +/-5%
Limit switch function
Limit switch function
active high
Cable
Cable
Polytetrafluoroethylene (PTFE) shielding with silver-coated copper braiding, Teflon tube
Cable length
(within vacuum)
(within vacuum)
1.34m to vacuum outlet
Electrical connection D-Sub-connector 15-pin
(within vacuum)
(within vacuum)
male with integrated interface electronics APE
Pin layout
Pin layout
D350261
and linear scale LIF 401R
Measuring standard
Measuring standard
SUPRADUR-phase grating
Grating period
Grating period
8 µm
Thermal expansion coefficient
Thermal expansion coefficient
8x10^-6 1/K
Accuracy
Accuracy
+/- 3µm
Measuring length
Measuring length
10 mm
Refrence mark position
Refrence mark position
at midpoint of measuring length
Mounting
Mounting
without Precimet
Special feature
Special feature
reduced tolerance of the cable length