Letzte Aktualisierung: July 25 2024 23:36:47.
LIF 471V for vacuum applications up to 10/-7 mbar
Produced in clean room environment
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Technical data
LIF 471V for vacuum applications up to 10/-7 mbar
Produced in clean room environment
complete system consisting of:
Scanning unit LIF 47V
Signal period: 4 µm
Coefficient of thermal expansion: ~8ppm/K
Reference mark: Active
Output signals: Square-wave signals,TTL
level with 20-fold
interpolation
Max. scanning frequency: 125 kHz
Reference pulse width: 90°
Fault detection signal: In the event of fault
Ua0/Ua1/Ua2 high
Hysteresis: without
Power supply: 5V +/-5%
Limit switch function: active high
Cable: Polytetrafluoroethylene
(PTFE) shielding
with silver-coated
copper braiding
Cable length
(within vacuum): 2.5 m to vacuum outlet
Electrical connection D-Sub-connector female
(within vacuum): 15-pin
Cable length: 0.5 m to D-Sub-
Connector 15-pin
male with integrated
interface electronics
APE
Pin layout: D350261
and linear scale LIF 401R
Measuring standard: SUPRADUR-phase grating
Grating period: 8 µm
Thermal expansion coefficient: 8x10^-6 1/K
Accuracy: +/- 3µm
Measuring length: 120 mm
Refrence mark position: at midpoint of
measuring length
Mounting: without Precimet
Produced in clean room environment
complete system consisting of:
Scanning unit LIF 47V
Signal period: 4 µm
Coefficient of thermal expansion: ~8ppm/K
Reference mark: Active
Output signals: Square-wave signals,TTL
level with 20-fold
interpolation
Max. scanning frequency: 125 kHz
Reference pulse width: 90°
Fault detection signal: In the event of fault
Ua0/Ua1/Ua2 high
Hysteresis: without
Power supply: 5V +/-5%
Limit switch function: active high
Cable: Polytetrafluoroethylene
(PTFE) shielding
with silver-coated
copper braiding
Cable length
(within vacuum): 2.5 m to vacuum outlet
Electrical connection D-Sub-connector female
(within vacuum): 15-pin
Cable length: 0.5 m to D-Sub-
Connector 15-pin
male with integrated
interface electronics
APE
Pin layout: D350261
and linear scale LIF 401R
Measuring standard: SUPRADUR-phase grating
Grating period: 8 µm
Thermal expansion coefficient: 8x10^-6 1/K
Accuracy: +/- 3µm
Measuring length: 120 mm
Refrence mark position: at midpoint of
measuring length
Mounting: without Precimet
Identnumber
Identnumber
585015-02
complete system consisting of
complete system consisting of
Scanning unit LIF 47V
Signal period
Signal period
4 µm
Coefficient of thermal expansion
Coefficient of thermal expansion
~8ppm/K
Reference mark
Reference mark
Active
Output signals
Output signals
Square-wave signals,TTL level with 20-fold interpolation
Max. scanning frequency
Max. scanning frequency
125 kHz
Reference pulse width
Reference pulse width
90°
Fault detection signal
Fault detection signal
In the event of fault Ua0/Ua1/Ua2 high
Hysteresis
Hysteresis
without
Power supply
Power supply
5V +/-5%
Limit switch function
Limit switch function
active high
Cable
Cable
Polytetrafluoroethylene (PTFE) shielding with silver-coated copper braiding
Cable length
(within vacuum)
(within vacuum)
2.5 m to vacuum outlet
Electrical connection D-Sub-connector female
(within vacuum)
(within vacuum)
15-pin
Cable length
Cable length
0.5 m to D-Sub- Connector 15-pin male with integrated interface electronics APE
Pin layout
Pin layout
D350261
and linear scale LIF 401R
Measuring standard
Measuring standard
SUPRADUR-phase grating
Grating period
Grating period
8 µm
Thermal expansion coefficient
Thermal expansion coefficient
8x10^-6 1/K
Accuracy
Accuracy
+/- 3µm
Measuring length
Measuring length
120 mm
Refrence mark position
Refrence mark position
at midpoint of measuring length
Mounting
Mounting
without Precimet
SCIP ID
SCIP ID
b6ac259e-6ddd-46af-a955-bf0faa32478b